Optical Emission Spectroscopy of Diffuse Coplanar Surface Barrier Discharge
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چکیده
Diffuse coplanar surface barrier discharge (DCSBD) as the source of nonequilibrium plasma is widely used nowadays for surface modification of different materials. DCSBD plasma consists of many microdischarges which are moving along the planar dielectric plate and create a thin layer of macroscopically homogeneous plasma above dielectric. The influences of humidity in carrier gas at atmospheric pressure studied by optical emission spectroscopy (OES) and of the electrode width studied by space resolved OES of one DCSBD microdischarge were investigated.
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تاریخ انتشار 2013